Marteq acquires the Verteq product lines

Marteq is the official OEM source for Verteq products including the SuperClean rinser dryer and Sunburst Turbo megasonics.

As of July 2008, the original patents covering the SuperClean nitrogen labyrinth seal and the many Verteq megasonic patents have been acquired by Marteq from Akrion (see Akrion press release).

Marteq was created from the assetts and employees of the Verteq/Akrion factory in Santa Ana, CA. The offices and manufacturing have since been moved to Irvine, CA, just a few miles from the previous location.

We at Marteq are the people that originally designed and built this equipment, and we look forward to continuing the tradition of quality manufacturing and service that Verteq provided for its customers.

Brochure Downloads

Company Summary

Product Line Overview

Worldwide Sales Contacts

North American Sales/Support

European Sales/Support

Asian Sales/Support

Location information

Factory manufactured new equipment

Marteq owns all the original engineering, documentation, and manufacturing procedures used by the original Verteq factory, and employs many of the same people that set the quality standard the industry has come to expect from the SuperClean rinser dryer and Sunburst Turbo megasonic product lines.

We manufacture the following products as new and replacement systems.

Sunburst Turbo Plus

Verteq’s most advanced and versatile megasonic technology. Originally developed exclusively for the VcS process system, the STP megasonic is now available as a component-only sub-system from Marteq.

Sunburst Turbo Quickdump

STQD600 (C1, C2)

STQD800 (C1, C2, CC50)

Sunburst Turbo Plus

STP800 (C1, C2, CC50)

Sunburst Turbo

ST600 (C1, C2)

ST800 (C1, C2, CC50)

SuperCLean

1600-55 (front-loading)

1800-6 (front-loading)

SC200 (top-loading)

SC300 (top-loading)

Brochure Downloads

Sunburst Turbo Plus Megasonics

Sunburst Turbo Megasonics

SuperClean 1600-55

SuperClean 1800-6

SuperClean SC200/SC300

Reconditioned SRDs and refurbish sevices

1600-5, 1600-4, 1600-3, 1800-6, SC200, SC300

for wafers, masks, discs, others

We sell factory reconditioned rinser dryers. We also buy used SRDs to refurbish, and we provide reconditioning services for your original-owner or used rinser dryer.

Buying “as-is” doesn’t mean “ready to perform.” Let Marteq refurbish your used Verteq SRD so it performas at or near original factory capability.

We’ll re-electropolish the bowl and rotor to factory specs, recondition the plumbing and control systems, and most importantly, ensure that the nitrogen labyrith seal meets factory specs so you get that patented SuperClean performance you’re expecting.

Custom Rotors

Need new or customized rotors for your substrates? We do that too.

Spares, repairs, service for all Verteq products

SuperClean

Sunburst Turbo

Sunburst Turbo Plus

Sunburst Turbo Quickdump

VcS Wet Process Systems

Cobra Wet Process Systems

ES200 Wet Process Systems

We sell all Verteq Spare Parts including:

  • bladder door seals
  • bowl heaters
  • CleanCoil thermostat
  • static eliminator
  • transducer assemblies
  • quickdump valves
  • replacement tanks
  • Galil controllers

Spare Parts List Downloads

1800-6 Spare Parts List

1600-55A/M Spare Parts List

1600-34 Spare Parts List

Megasonic Amplifiers

Model: RFA-420/MD-350

4121387
120V, Std. Conn
1076939.1
220V, No Conn
1076939.3
120V, w/IEC Conn
1076939.5
220V, w/IEC Conn